Submicron Structure Fabrication and Research

Contains reports on six research projects.

Bibliographic Details
Main Authors:	Melngailis, John, Smith, Henry I., Hawryluk, Andrew M., Dana, Stephane S., Bezdjian, Krikor A., Rotter, Shlomo, Kwasnick, Robert F., Kastner, Marc A., Horwitz, Christopher M.
Format:	Technical Report
Language:	English
Published:	Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) 2010
Subjects:	Submicron Structure Fabrication Submicron Structure Research Operation of Submicron Structures Laboratory Development of Microfabrication Techniques X-Ray Lenses X-Ray Gratings Graphoepitaxy One-Dimensional Conduction in Silicon Reactive Ion Etching
Online Access:	http://hdl.handle.net/1721.1/56806

Internet

http://hdl.handle.net/1721.1/56806