Submicron Structure Fabrication and Research
Contains reports on six research projects.
| Main Authors: | , , , , , , , , |
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| Format: | Technical Report |
| Language: | English |
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Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
2010
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/56806 |
| _version_ | 1826205689591103488 |
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| author | Melngailis, John Smith, Henry I. Hawryluk, Andrew M. Dana, Stephane S. Bezdjian, Krikor A. Rotter, Shlomo Kwasnick, Robert F. Kastner, Marc A. Horwitz, Christopher M. |
| author_facet | Melngailis, John Smith, Henry I. Hawryluk, Andrew M. Dana, Stephane S. Bezdjian, Krikor A. Rotter, Shlomo Kwasnick, Robert F. Kastner, Marc A. Horwitz, Christopher M. |
| author_sort | Melngailis, John |
| collection | MIT |
| description | Contains reports on six research projects. |
| first_indexed | 2024-09-23T13:17:22Z |
| format | Technical Report |
| id | mit-1721.1/56806 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T13:17:22Z |
| publishDate | 2010 |
| publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| record_format | dspace |
| spelling | mit-1721.1/568062019-04-11T09:33:38Z Submicron Structure Fabrication and Research Melngailis, John Smith, Henry I. Hawryluk, Andrew M. Dana, Stephane S. Bezdjian, Krikor A. Rotter, Shlomo Kwasnick, Robert F. Kastner, Marc A. Horwitz, Christopher M. Submicron Structure Fabrication Submicron Structure Research Operation of Submicron Structures Laboratory Development of Microfabrication Techniques X-Ray Lenses X-Ray Gratings Graphoepitaxy One-Dimensional Conduction in Silicon Reactive Ion Etching Contains reports on six research projects. Joint Services Electronics Program (Contract DAAG29-78-C-0020) Joint Services Electronics Program (Contract DAAG29-80-C-0104) M.I.T. Sloan Fund for Basic Research U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908) Lawrence Livermore Laboratory (Subcontract 206-92-09) U.S. Department of Energy (Contract DE-ACO2-80-E10179) Harkness Foundation 2010-07-15T21:20:43Z 2010-07-15T21:20:43Z 1981-01 Technical Report RLE_PR_123_XIX http://hdl.handle.net/1721.1/56806 en Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1981 General Physics Submicron Structure Fabrication and Research Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 123 Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. application/pdf Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| spellingShingle | Submicron Structure Fabrication Submicron Structure Research Operation of Submicron Structures Laboratory Development of Microfabrication Techniques X-Ray Lenses X-Ray Gratings Graphoepitaxy One-Dimensional Conduction in Silicon Reactive Ion Etching Melngailis, John Smith, Henry I. Hawryluk, Andrew M. Dana, Stephane S. Bezdjian, Krikor A. Rotter, Shlomo Kwasnick, Robert F. Kastner, Marc A. Horwitz, Christopher M. Submicron Structure Fabrication and Research |
| title | Submicron Structure Fabrication and Research |
| title_full | Submicron Structure Fabrication and Research |
| title_fullStr | Submicron Structure Fabrication and Research |
| title_full_unstemmed | Submicron Structure Fabrication and Research |
| title_short | Submicron Structure Fabrication and Research |
| title_sort | submicron structure fabrication and research |
| topic | Submicron Structure Fabrication Submicron Structure Research Operation of Submicron Structures Laboratory Development of Microfabrication Techniques X-Ray Lenses X-Ray Gratings Graphoepitaxy One-Dimensional Conduction in Silicon Reactive Ion Etching |
| url | http://hdl.handle.net/1721.1/56806 |
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