Submicron Structures Technology and Research

Contains reports on ten research projects.

Bibliographic Details
Main Authors:	Anderson, Erik H., Chu, William, Plotnik, Irving, Schattenburg, Mark L., Smith, Henry I., Yen, Anthony T., Warren, Alan C., Antoniadis, Dimitri A., Orlando, Terry P., Melngailis, John, Chou, Stephen Y., Shahidi, Ghavam G., Licini, Jerome C., Scott-Thomas, John H. F., Park, Samuel L., Kastner, Marc A., Atwater, Harry A., Garrison, Stephen M., Palmer, Joyce E., Quek, Hui Meng, Wong, Chee C., Thompson, Carl V., Canizaares, Claude C., Stein, Josephine A., Summa, Deborah A., Paynter, Henry M., Rajchman, Jan A., Tse, Ming K.
Format:	Technical Report
Language:	English
Published:	Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) 2010
Subjects:	Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 0.1 μm and Below Corrugated Gate MOS Structures MOSFET's in Si with Deep-Submicron Channel Lengths Electronic Conduction in Submicron Silicon Inversion Layers Crystalline Films on Amorphous Substrates Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Soft X-Ray Interferometer Gratings Switchable Zero Order Diffraction Grating Light Valves
Online Access:	http://hdl.handle.net/1721.1/56948

Internet

http://hdl.handle.net/1721.1/56948