Submicron Structures Technology and Research
Contains reports on ten research projects.
| Main Authors: | , , , , , , , , , , , , , , , , , , , , , , , , , , , |
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| Format: | Technical Report |
| Language: | English |
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Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
2010
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/56948 |
| _version_ | 1826210645998043136 |
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| author | Anderson, Erik H. Chu, William Plotnik, Irving Schattenburg, Mark L. Smith, Henry I. Yen, Anthony T. Warren, Alan C. Antoniadis, Dimitri A. Orlando, Terry P. Melngailis, John Chou, Stephen Y. Shahidi, Ghavam G. Licini, Jerome C. Scott-Thomas, John H. F. Park, Samuel L. Kastner, Marc A. Atwater, Harry A. Garrison, Stephen M. Palmer, Joyce E. Quek, Hui Meng Wong, Chee C. Thompson, Carl V. Canizaares, Claude C. Stein, Josephine A. Summa, Deborah A. Paynter, Henry M. Rajchman, Jan A. Tse, Ming K. |
| author_facet | Anderson, Erik H. Chu, William Plotnik, Irving Schattenburg, Mark L. Smith, Henry I. Yen, Anthony T. Warren, Alan C. Antoniadis, Dimitri A. Orlando, Terry P. Melngailis, John Chou, Stephen Y. Shahidi, Ghavam G. Licini, Jerome C. Scott-Thomas, John H. F. Park, Samuel L. Kastner, Marc A. Atwater, Harry A. Garrison, Stephen M. Palmer, Joyce E. Quek, Hui Meng Wong, Chee C. Thompson, Carl V. Canizaares, Claude C. Stein, Josephine A. Summa, Deborah A. Paynter, Henry M. Rajchman, Jan A. Tse, Ming K. |
| author_sort | Anderson, Erik H. |
| collection | MIT |
| description | Contains reports on ten research projects. |
| first_indexed | 2024-09-23T14:52:55Z |
| format | Technical Report |
| id | mit-1721.1/56948 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T14:52:55Z |
| publishDate | 2010 |
| publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| record_format | dspace |
| spelling | mit-1721.1/569482019-04-11T08:55:01Z Submicron Structures Technology and Research Anderson, Erik H. Chu, William Plotnik, Irving Schattenburg, Mark L. Smith, Henry I. Yen, Anthony T. Warren, Alan C. Antoniadis, Dimitri A. Orlando, Terry P. Melngailis, John Chou, Stephen Y. Shahidi, Ghavam G. Licini, Jerome C. Scott-Thomas, John H. F. Park, Samuel L. Kastner, Marc A. Atwater, Harry A. Garrison, Stephen M. Palmer, Joyce E. Quek, Hui Meng Wong, Chee C. Thompson, Carl V. Canizaares, Claude C. Stein, Josephine A. Summa, Deborah A. Paynter, Henry M. Rajchman, Jan A. Tse, Ming K. Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 0.1 μm and Below Corrugated Gate MOS Structures MOSFET's in Si with Deep-Submicron Channel Lengths Electronic Conduction in Submicron Silicon Inversion Layers Crystalline Films on Amorphous Substrates Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Soft X-Ray Interferometer Gratings Switchable Zero Order Diffraction Grating Light Valves Contains reports on ten research projects. Joint Services Electronics Program (Contract DAAG29-83-K-0003) Joint Services Electronics Program (Contract DAAL03-86-K-0002) National Science Foundation (Grant ECS82-05701) National Science Foundation (Grant ECS85-06565) Lawrence Livermore Laboratory (Subcontract 2069209) National Science Foundation (Grant ECS85-03443) U.S. Air Force - Office of Scientific Research (Grant AFOSR-85-0154) National Aeronautics and Space Administration (Grant NGL22-009-638) National Science Foundation (through KMS Fusion, Inc.) U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908) 2010-07-15T22:07:01Z 2010-07-15T22:07:01Z 1986-01 Technical Report RLE_PR_128_01 http://hdl.handle.net/1721.1/56948 en Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1986 Submicron Structures Technology and Research Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 128 Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. application/pdf Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| spellingShingle | Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 0.1 μm and Below Corrugated Gate MOS Structures MOSFET's in Si with Deep-Submicron Channel Lengths Electronic Conduction in Submicron Silicon Inversion Layers Crystalline Films on Amorphous Substrates Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Soft X-Ray Interferometer Gratings Switchable Zero Order Diffraction Grating Light Valves Anderson, Erik H. Chu, William Plotnik, Irving Schattenburg, Mark L. Smith, Henry I. Yen, Anthony T. Warren, Alan C. Antoniadis, Dimitri A. Orlando, Terry P. Melngailis, John Chou, Stephen Y. Shahidi, Ghavam G. Licini, Jerome C. Scott-Thomas, John H. F. Park, Samuel L. Kastner, Marc A. Atwater, Harry A. Garrison, Stephen M. Palmer, Joyce E. Quek, Hui Meng Wong, Chee C. Thompson, Carl V. Canizaares, Claude C. Stein, Josephine A. Summa, Deborah A. Paynter, Henry M. Rajchman, Jan A. Tse, Ming K. Submicron Structures Technology and Research |
| title | Submicron Structures Technology and Research |
| title_full | Submicron Structures Technology and Research |
| title_fullStr | Submicron Structures Technology and Research |
| title_full_unstemmed | Submicron Structures Technology and Research |
| title_short | Submicron Structures Technology and Research |
| title_sort | submicron structures technology and research |
| topic | Submicron Structures Technology Submicron Structures Research Submicron Structures Laboratory Microfabrication at Linewidths of 0.1 μm and Below Corrugated Gate MOS Structures MOSFET's in Si with Deep-Submicron Channel Lengths Electronic Conduction in Submicron Silicon Inversion Layers Crystalline Films on Amorphous Substrates Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Soft X-Ray Interferometer Gratings Switchable Zero Order Diffraction Grating Light Valves |
| url | http://hdl.handle.net/1721.1/56948 |
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