Submicron Structures Technology and Research

Submicron Structures Technology and Research

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Contains reports on fifteen research projects.

Bibliographic Details
Main Authors:	Anderson, Erik H., Carter, James M., Chu, William, Quek, Hui Meng, Plotnik, Irving, Schattenburg, Mark L., Yen, Anthony T., Smith, Henry I., Ku, Yao-C., Field, S. B., Licini, Jerome C., Meirav, Udi, Park, Samuel L., Scott-Thomas, John H. F., Antoniadis, Dimitri A., Kastner, Marc A., Bagwell, Phillip F., Orlando, Terry P., Ismail, Khalid, Shahidi, Ghavam G., Ajuria, Sergio, Atwater, Harry A., Floro, Jerrold A., Thompson, Carl V., Palmer, Joyce E., Canizares, Claude R.
Format:	Technical Report
Language:	English
Published:	Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) 2010
Subjects:	Submicron Structures Technology and Research Submicron Structures Laboratory Microfabrication at Linewidths of 100nm and Below Improved Mask Technology For X-Ray Lithography Theoretical Analysis Of The Lithography Process Electronic Conduction In One-Dimensional Semiconductor Devices Surface Superlattice Formation In Silicon Inversion Layers Using 200 μm Period Grating-Gate Field-Effect Transistors Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistors Investigation of One-Dimensional Conductivity in Multiple, Parallel Inversion Lines Electron Transport In MOSFET's In Si With Deep-Submicron Channel Lengths Crystalline Films On Amorphous Substrates Ion-Bombardment-Enhanced Grain Growth In Thin Films Epitaxy via Surface-Energy-Driven Grain Growth Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Soft X-Ray Interferometer Gratings
Online Access:	http://hdl.handle.net/1721.1/57036

Internet

http://hdl.handle.net/1721.1/57036