Submicron Structures Technology and Research
Contains reports on fifteen research projects.
| Main Authors: | , , , , , , , , , , , , , , , , , , , , , , , , , |
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| Format: | Technical Report |
| Language: | English |
| Published: |
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
2010
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/57036 |
| _version_ | 1826200945092984832 |
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| author | Anderson, Erik H. Carter, James M. Chu, William Quek, Hui Meng Plotnik, Irving Schattenburg, Mark L. Yen, Anthony T. Smith, Henry I. Ku, Yao-C. Field, S. B. Licini, Jerome C. Meirav, Udi Park, Samuel L. Scott-Thomas, John H. F. Antoniadis, Dimitri A. Kastner, Marc A. Bagwell, Phillip F. Orlando, Terry P. Ismail, Khalid Shahidi, Ghavam G. Ajuria, Sergio Atwater, Harry A. Floro, Jerrold A. Thompson, Carl V. Palmer, Joyce E. Canizares, Claude R. |
| author_facet | Anderson, Erik H. Carter, James M. Chu, William Quek, Hui Meng Plotnik, Irving Schattenburg, Mark L. Yen, Anthony T. Smith, Henry I. Ku, Yao-C. Field, S. B. Licini, Jerome C. Meirav, Udi Park, Samuel L. Scott-Thomas, John H. F. Antoniadis, Dimitri A. Kastner, Marc A. Bagwell, Phillip F. Orlando, Terry P. Ismail, Khalid Shahidi, Ghavam G. Ajuria, Sergio Atwater, Harry A. Floro, Jerrold A. Thompson, Carl V. Palmer, Joyce E. Canizares, Claude R. |
| author_sort | Anderson, Erik H. |
| collection | MIT |
| description | Contains reports on fifteen research projects. |
| first_indexed | 2024-09-23T11:44:11Z |
| format | Technical Report |
| id | mit-1721.1/57036 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T11:44:11Z |
| publishDate | 2010 |
| publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| record_format | dspace |
| spelling | mit-1721.1/570362019-04-10T10:24:53Z Submicron Structures Technology and Research Anderson, Erik H. Carter, James M. Chu, William Quek, Hui Meng Plotnik, Irving Schattenburg, Mark L. Yen, Anthony T. Smith, Henry I. Ku, Yao-C. Field, S. B. Licini, Jerome C. Meirav, Udi Park, Samuel L. Scott-Thomas, John H. F. Antoniadis, Dimitri A. Kastner, Marc A. Bagwell, Phillip F. Orlando, Terry P. Ismail, Khalid Shahidi, Ghavam G. Ajuria, Sergio Atwater, Harry A. Floro, Jerrold A. Thompson, Carl V. Palmer, Joyce E. Canizares, Claude R. Submicron Structures Technology and Research Submicron Structures Laboratory Microfabrication at Linewidths of 100nm and Below Improved Mask Technology For X-Ray Lithography Theoretical Analysis Of The Lithography Process Electronic Conduction In One-Dimensional Semiconductor Devices Surface Superlattice Formation In Silicon Inversion Layers Using 200 μm Period Grating-Gate Field-Effect Transistors Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistors Investigation of One-Dimensional Conductivity in Multiple, Parallel Inversion Lines Electron Transport In MOSFET's In Si With Deep-Submicron Channel Lengths Crystalline Films On Amorphous Substrates Ion-Bombardment-Enhanced Grain Growth In Thin Films Epitaxy via Surface-Energy-Driven Grain Growth Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Soft X-Ray Interferometer Gratings Contains reports on fifteen research projects. Joint Services Electronics Program (Contract DAALO3-86-K-0002) National Science Foundation (Grant ECS 87-09806) Semiconductor Research Corporation (Contract 87-SP-080) National Science Foundation (Grant ECS 85-03443) U.S. Air Force - Office of Scientific Research (Grant AFOSR 85-0376) National Science Foundation (Grant ECS 85-06565) U.S. Air Force - Office of Scientific Research (Grant AFOSR 85-0154) Lawrence Livermore National Laboratory (Subcontract 2069209) National Aeronautics and Space Adminstration (Grant NGL22-009-683) Collaboration with KMS Fusion, Inc. 2010-07-16T03:49:23Z 2010-07-16T03:49:23Z 1987-01-01 to 1987-12-31 Technical Report RLE_PR_130_01 http://hdl.handle.net/1721.1/57036 en Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1987 Submicron Structures Technology and Research Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 130 Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. application/pdf Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| spellingShingle | Submicron Structures Technology and Research Submicron Structures Laboratory Microfabrication at Linewidths of 100nm and Below Improved Mask Technology For X-Ray Lithography Theoretical Analysis Of The Lithography Process Electronic Conduction In One-Dimensional Semiconductor Devices Surface Superlattice Formation In Silicon Inversion Layers Using 200 μm Period Grating-Gate Field-Effect Transistors Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistors Investigation of One-Dimensional Conductivity in Multiple, Parallel Inversion Lines Electron Transport In MOSFET's In Si With Deep-Submicron Channel Lengths Crystalline Films On Amorphous Substrates Ion-Bombardment-Enhanced Grain Growth In Thin Films Epitaxy via Surface-Energy-Driven Grain Growth Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Soft X-Ray Interferometer Gratings Anderson, Erik H. Carter, James M. Chu, William Quek, Hui Meng Plotnik, Irving Schattenburg, Mark L. Yen, Anthony T. Smith, Henry I. Ku, Yao-C. Field, S. B. Licini, Jerome C. Meirav, Udi Park, Samuel L. Scott-Thomas, John H. F. Antoniadis, Dimitri A. Kastner, Marc A. Bagwell, Phillip F. Orlando, Terry P. Ismail, Khalid Shahidi, Ghavam G. Ajuria, Sergio Atwater, Harry A. Floro, Jerrold A. Thompson, Carl V. Palmer, Joyce E. Canizares, Claude R. Submicron Structures Technology and Research |
| title | Submicron Structures Technology and Research |
| title_full | Submicron Structures Technology and Research |
| title_fullStr | Submicron Structures Technology and Research |
| title_full_unstemmed | Submicron Structures Technology and Research |
| title_short | Submicron Structures Technology and Research |
| title_sort | submicron structures technology and research |
| topic | Submicron Structures Technology and Research Submicron Structures Laboratory Microfabrication at Linewidths of 100nm and Below Improved Mask Technology For X-Ray Lithography Theoretical Analysis Of The Lithography Process Electronic Conduction In One-Dimensional Semiconductor Devices Surface Superlattice Formation In Silicon Inversion Layers Using 200 μm Period Grating-Gate Field-Effect Transistors Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistors Investigation of One-Dimensional Conductivity in Multiple, Parallel Inversion Lines Electron Transport In MOSFET's In Si With Deep-Submicron Channel Lengths Crystalline Films On Amorphous Substrates Ion-Bombardment-Enhanced Grain Growth In Thin Films Epitaxy via Surface-Energy-Driven Grain Growth Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy Soft X-Ray Interferometer Gratings |
| url | http://hdl.handle.net/1721.1/57036 |
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