Submicron Structures Technology and Research

Submicron Structures Technology and Research

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Contains reports on fifteen research projects.

Bibliographic Details
Main Authors: Anderson, Erik H., Carter, James M., Chu, William, Quek, Hui Meng, Plotnik, Irving, Schattenburg, Mark L., Yen, Anthony T., Smith, Henry I., Ku, Yao-C., Field, S. B., Licini, Jerome C., Meirav, Udi, Park, Samuel L., Scott-Thomas, John H. F., Antoniadis, Dimitri A., Kastner, Marc A., Bagwell, Phillip F., Orlando, Terry P., Ismail, Khalid, Shahidi, Ghavam G., Ajuria, Sergio, Atwater, Harry A., Floro, Jerrold A., Thompson, Carl V., Palmer, Joyce E., Canizares, Claude R.
Format: Technical Report
Language:English
Published: Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) 2010
Subjects:
Submicron Structures Technology and Research
Submicron Structures Laboratory
Microfabrication at Linewidths of 100nm and Below
Improved Mask Technology For X-Ray Lithography
Theoretical Analysis Of The Lithography Process
Electronic Conduction In One-Dimensional Semiconductor Devices
Surface Superlattice Formation In Silicon Inversion Layers Using 200 μm Period Grating-Gate Field-Effect Transistors
Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistors
Investigation of One-Dimensional Conductivity in Multiple, Parallel Inversion Lines
Electron Transport In MOSFET's In Si With Deep-Submicron Channel Lengths
Crystalline Films On Amorphous Substrates
Ion-Bombardment-Enhanced Grain Growth In Thin Films
Epitaxy via Surface-Energy-Driven Grain Growth
Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy
High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy
Soft X-Ray Interferometer Gratings
Online Access:http://hdl.handle.net/1721.1/57036

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