Submicron and Nanometer Structures Technology and Research

Submicron and Nanometer Structures Technology and Research

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Contains reports on twenty research projects and a list of publications.

书目详细资料
Main Authors:	Smith, Henry I., Aucoin, Richard J., Carter, James M., Chu, William, Fleming, Robert C., Jr., Ghanbari, Reza A., Gupta, Nitin, Hector, Scott D., Li, Huiying, Moel, Alberto M., Schattenburg, Mark L., Wong, Vincent V., Ferrera, Juan, Lim, Michael H. Y., Mondol, Mark K., Frankel, Robert, Shah, Satyen N., Antoniadis, Dimitri A., Chung, James E., Fang, Hao, Hu, Hang, Eugster, Cristopher C., Kumar, Arvind, Orlando, Terry P., Rooks, Michael J., Burkhardt, Martin, del Alamo, Jesús A., Chou, Michael T., Shayegan, M., Sang-hun, Song, Tsui, Daniel, Yee, Kenneth, Zhao, Yang, Choi, Woo-Young, Fonstad, Clifton G., Jr., Damask, Jay N., Haus, Hermann A., Kolodziejski, Leslie A., Chu, Jack, Graybeal, John M., Meyerson, Bernard S., Rittenhouse, George E., Lew, Julie C., Canizares, Claude R., Ismail, Khalid, Karam, Nasser
格式:	Technical Report
语言:	English
出版:	Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) 2010
主题:	Submicron Structures Technology Submicron Structures Research Nanometer Structures Technology Nanometer Structures Research Submicron Structures Laboratory X-Ray Nanolithography Improved Mask Technology for X-Ray Lithography Improved Scanning Electron Beam Lithography High-Precision Mask Alignment Scheme Achromatic Holographic Lithography Fabrication of T-gate Devices using X-ray Lithography Tenth-micron MOSFET Device Technology Coulomb Charging Effects in Semiconductor Nanostructures Quasi-One-Dimensional Wires in GaAs/AIGaAs Modulation Doped Field-Effect Transistors Planar-Resonant-Tunneling Field-Effect Transistors (PRESTFET) Dual Electron Waveguide Device Fabricated Using X-ray Lithography Far-Infrared Spectroscopy of Arrays of Quantum Dots Far-Infrared Spectroscopy of Arrays of Quantum Wires Ridge-Grating Distributed-Feedback Lasers Fabricated by X-Ray Lithography Channel-Dropping Filters Fabricated by X-Ray Lithography Novel Superconducting Tunneling Structures Submicrometer-Period Transmission Gratings for X-ray Spectroscopy Submicrometer-Period Transmission Gratings for X-ray Interferometry Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopy Submicron-Thickness X-ray Window Technology GaAs Epitaxy on Sawtooth-Patterned Silicon
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http://hdl.handle.net/1721.1/57219