Submicron and Nanometer Structures Technology and Research
Contains reports on twenty research projects and a list of publications.
| Main Authors: | , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , |
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| Format: | Technical Report |
| Language: | English |
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Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
2010
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| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/57219 |
| _version_ | 1826192061745856512 |
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| author | Smith, Henry I. Aucoin, Richard J. Carter, James M. Chu, William Fleming, Robert C., Jr. Ghanbari, Reza A. Gupta, Nitin Hector, Scott D. Li, Huiying Moel, Alberto M. Schattenburg, Mark L. Wong, Vincent V. Ferrera, Juan Lim, Michael H. Y. Mondol, Mark K. Frankel, Robert Shah, Satyen N. Antoniadis, Dimitri A. Chung, James E. Fang, Hao Hu, Hang Eugster, Cristopher C. Kumar, Arvind Orlando, Terry P. Rooks, Michael J. Burkhardt, Martin del Alamo, Jesús A. Chou, Michael T. Shayegan, M. Sang-hun, Song Tsui, Daniel Yee, Kenneth Zhao, Yang Choi, Woo-Young Fonstad, Clifton G., Jr. Damask, Jay N. Haus, Hermann A. Kolodziejski, Leslie A. Chu, Jack Graybeal, John M. Meyerson, Bernard S. Rittenhouse, George E. Lew, Julie C. Canizares, Claude R. Ismail, Khalid Karam, Nasser |
| author_facet | Smith, Henry I. Aucoin, Richard J. Carter, James M. Chu, William Fleming, Robert C., Jr. Ghanbari, Reza A. Gupta, Nitin Hector, Scott D. Li, Huiying Moel, Alberto M. Schattenburg, Mark L. Wong, Vincent V. Ferrera, Juan Lim, Michael H. Y. Mondol, Mark K. Frankel, Robert Shah, Satyen N. Antoniadis, Dimitri A. Chung, James E. Fang, Hao Hu, Hang Eugster, Cristopher C. Kumar, Arvind Orlando, Terry P. Rooks, Michael J. Burkhardt, Martin del Alamo, Jesús A. Chou, Michael T. Shayegan, M. Sang-hun, Song Tsui, Daniel Yee, Kenneth Zhao, Yang Choi, Woo-Young Fonstad, Clifton G., Jr. Damask, Jay N. Haus, Hermann A. Kolodziejski, Leslie A. Chu, Jack Graybeal, John M. Meyerson, Bernard S. Rittenhouse, George E. Lew, Julie C. Canizares, Claude R. Ismail, Khalid Karam, Nasser |
| author_sort | Smith, Henry I. |
| collection | MIT |
| description | Contains reports on twenty research projects and a list of publications. |
| first_indexed | 2024-09-23T09:05:42Z |
| format | Technical Report |
| id | mit-1721.1/57219 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T09:05:42Z |
| publishDate | 2010 |
| publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| record_format | dspace |
| spelling | mit-1721.1/572192019-04-10T20:42:34Z Submicron and Nanometer Structures Technology and Research Smith, Henry I. Aucoin, Richard J. Carter, James M. Chu, William Fleming, Robert C., Jr. Ghanbari, Reza A. Gupta, Nitin Hector, Scott D. Li, Huiying Moel, Alberto M. Schattenburg, Mark L. Wong, Vincent V. Ferrera, Juan Lim, Michael H. Y. Mondol, Mark K. Frankel, Robert Shah, Satyen N. Antoniadis, Dimitri A. Chung, James E. Fang, Hao Hu, Hang Eugster, Cristopher C. Kumar, Arvind Orlando, Terry P. Rooks, Michael J. Burkhardt, Martin del Alamo, Jesús A. Chou, Michael T. Shayegan, M. Sang-hun, Song Tsui, Daniel Yee, Kenneth Zhao, Yang Choi, Woo-Young Fonstad, Clifton G., Jr. Damask, Jay N. Haus, Hermann A. Kolodziejski, Leslie A. Chu, Jack Graybeal, John M. Meyerson, Bernard S. Rittenhouse, George E. Lew, Julie C. Canizares, Claude R. Ismail, Khalid Karam, Nasser Submicron Structures Technology Submicron Structures Research Nanometer Structures Technology Nanometer Structures Research Submicron Structures Laboratory X-Ray Nanolithography Improved Mask Technology for X-Ray Lithography Improved Scanning Electron Beam Lithography High-Precision Mask Alignment Scheme Achromatic Holographic Lithography Fabrication of T-gate Devices using X-ray Lithography Tenth-micron MOSFET Device Technology Coulomb Charging Effects in Semiconductor Nanostructures Quasi-One-Dimensional Wires in GaAs/AIGaAs Modulation Doped Field-Effect Transistors Planar-Resonant-Tunneling Field-Effect Transistors (PRESTFET) Dual Electron Waveguide Device Fabricated Using X-ray Lithography Far-Infrared Spectroscopy of Arrays of Quantum Dots Far-Infrared Spectroscopy of Arrays of Quantum Wires Ridge-Grating Distributed-Feedback Lasers Fabricated by X-Ray Lithography Channel-Dropping Filters Fabricated by X-Ray Lithography Novel Superconducting Tunneling Structures Submicrometer-Period Transmission Gratings for X-ray Spectroscopy Submicrometer-Period Transmission Gratings for X-ray Interferometry Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopy Submicron-Thickness X-ray Window Technology GaAs Epitaxy on Sawtooth-Patterned Silicon Contains reports on twenty research projects and a list of publications. Defense Advanced Research Projects Agency Contract N00019-92-K-0021 Joint Services Electronics Program Contract DAAL03-92-C-0001 National Science Foundation Grant ECS 90-16437 U.S. Army Research Office Grant DAAL03-92-G-0291 IBM Corporation U.S. Air Force - Office of Scientific Research Grant F49620-92-J-0064 National Science Foundation Grant DMR 87-19217 National Science Foundation Grant DMR 90-22933 Defense Advanced Research Projects Agency Consortium for Superconducting Electronics National Aeronautics and Space Administration Contract NAS8-36748 National Aeronautics and Space Administration Grant NAGW-2003 2010-07-16T05:16:36Z 2010-07-16T05:16:36Z 1992-01-01 to 1992-12-31 Technical Report RLE_PR_135_01_02s_04 http://hdl.handle.net/1721.1/57219 en Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1992 Solid State Physics, Electronics and Optics Quantum-Effect Devices Submicron and Nanometer Structures Technology and Research Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 135 Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. application/pdf Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) |
| spellingShingle | Submicron Structures Technology Submicron Structures Research Nanometer Structures Technology Nanometer Structures Research Submicron Structures Laboratory X-Ray Nanolithography Improved Mask Technology for X-Ray Lithography Improved Scanning Electron Beam Lithography High-Precision Mask Alignment Scheme Achromatic Holographic Lithography Fabrication of T-gate Devices using X-ray Lithography Tenth-micron MOSFET Device Technology Coulomb Charging Effects in Semiconductor Nanostructures Quasi-One-Dimensional Wires in GaAs/AIGaAs Modulation Doped Field-Effect Transistors Planar-Resonant-Tunneling Field-Effect Transistors (PRESTFET) Dual Electron Waveguide Device Fabricated Using X-ray Lithography Far-Infrared Spectroscopy of Arrays of Quantum Dots Far-Infrared Spectroscopy of Arrays of Quantum Wires Ridge-Grating Distributed-Feedback Lasers Fabricated by X-Ray Lithography Channel-Dropping Filters Fabricated by X-Ray Lithography Novel Superconducting Tunneling Structures Submicrometer-Period Transmission Gratings for X-ray Spectroscopy Submicrometer-Period Transmission Gratings for X-ray Interferometry Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopy Submicron-Thickness X-ray Window Technology GaAs Epitaxy on Sawtooth-Patterned Silicon Smith, Henry I. Aucoin, Richard J. Carter, James M. Chu, William Fleming, Robert C., Jr. Ghanbari, Reza A. Gupta, Nitin Hector, Scott D. Li, Huiying Moel, Alberto M. Schattenburg, Mark L. Wong, Vincent V. Ferrera, Juan Lim, Michael H. Y. Mondol, Mark K. Frankel, Robert Shah, Satyen N. Antoniadis, Dimitri A. Chung, James E. Fang, Hao Hu, Hang Eugster, Cristopher C. Kumar, Arvind Orlando, Terry P. Rooks, Michael J. Burkhardt, Martin del Alamo, Jesús A. Chou, Michael T. Shayegan, M. Sang-hun, Song Tsui, Daniel Yee, Kenneth Zhao, Yang Choi, Woo-Young Fonstad, Clifton G., Jr. Damask, Jay N. Haus, Hermann A. Kolodziejski, Leslie A. Chu, Jack Graybeal, John M. Meyerson, Bernard S. Rittenhouse, George E. Lew, Julie C. Canizares, Claude R. Ismail, Khalid Karam, Nasser Submicron and Nanometer Structures Technology and Research |
| title | Submicron and Nanometer Structures Technology and Research |
| title_full | Submicron and Nanometer Structures Technology and Research |
| title_fullStr | Submicron and Nanometer Structures Technology and Research |
| title_full_unstemmed | Submicron and Nanometer Structures Technology and Research |
| title_short | Submicron and Nanometer Structures Technology and Research |
| title_sort | submicron and nanometer structures technology and research |
| topic | Submicron Structures Technology Submicron Structures Research Nanometer Structures Technology Nanometer Structures Research Submicron Structures Laboratory X-Ray Nanolithography Improved Mask Technology for X-Ray Lithography Improved Scanning Electron Beam Lithography High-Precision Mask Alignment Scheme Achromatic Holographic Lithography Fabrication of T-gate Devices using X-ray Lithography Tenth-micron MOSFET Device Technology Coulomb Charging Effects in Semiconductor Nanostructures Quasi-One-Dimensional Wires in GaAs/AIGaAs Modulation Doped Field-Effect Transistors Planar-Resonant-Tunneling Field-Effect Transistors (PRESTFET) Dual Electron Waveguide Device Fabricated Using X-ray Lithography Far-Infrared Spectroscopy of Arrays of Quantum Dots Far-Infrared Spectroscopy of Arrays of Quantum Wires Ridge-Grating Distributed-Feedback Lasers Fabricated by X-Ray Lithography Channel-Dropping Filters Fabricated by X-Ray Lithography Novel Superconducting Tunneling Structures Submicrometer-Period Transmission Gratings for X-ray Spectroscopy Submicrometer-Period Transmission Gratings for X-ray Interferometry Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopy Submicron-Thickness X-ray Window Technology GaAs Epitaxy on Sawtooth-Patterned Silicon |
| url | http://hdl.handle.net/1721.1/57219 |
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