Computer-Integrated Fabrication System Structure

Contains an introduction, reports on thirteen research projects and a list of publications.

Detalhes bibliográficos
Principais autores:	Troxel, Donald E., Stamatopolous, Miltiadis A., Gershwin, Stanley B., Love, Nicole S., Moyne, William P., Kao, James T., Kwon, Jimmy Y., Bonvik, Asbjoern M., Carney, John C., Fischer, Gregory T., Lohman, Thomas J., McIlrath, Michael B., Boning, Duane S., Unver, Evren R., Antoniadis, Dimitri A., Gabbay, Lynn D., Jacobs, Jarvis B., Rahman, Nadir E., Tso, Kit Yan
Formato:	Technical Report
Idioma:	English
Publicado em:	Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) 2010
Assuntos:	Computer-Integrated Fabrication System Structure CAFE Applications Organization of Data for Factory Design Organization of Data for Factory Control Organization of Algorithms for Factory Design Organization of Algorithms for Factory Control Statistical Process Control Charts for the Computer-Aided Fabrication Environment Interfaces of Run-by-Run Control Implementations of Run-by-Run Control Integration of Run-by-Run Control Hardware Setup for a Remote Microscope First-Order Model for Remote Fabrication Estimating the Lead Time Distribution of Priority Lots in a Semiconductor Factory Factory Display Software Message Passing Tools for Software Integration CAFE at MIT Lincoln Laboratory Error Handling Within CAFE Semiconductor Manufacturing Process Flow Representation Computer-Aided Technology Design
Acesso em linha:	http://hdl.handle.net/1721.1/57288

Internet

http://hdl.handle.net/1721.1/57288