Measurement of the Mass Flow and Tangential Momentum Accommodation Coefficient in Silicon Micromachined Channels
An analytic and experimental investigation into gaseous flow with slight rarefaction through long microchannels is undertaken in an attempt to obtain values of the Tangential Momentum Accommodation Coefficient (TMAC) for a common MicroElectroMechanical Systems (MEMS) surface. A set of analytic e...
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| Format: | Technical Report |
| Language: | en_US |
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Aerospace Computational Design Laboratory, Dept. of Aeronautics & Astronautics, Massachusetts Institute of Technology
2010
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| Online Access: | http://hdl.handle.net/1721.1/57611 |