Measurement of the Mass Flow and Tangential Momentum Accommodation Coefficient in Silicon Micromachined Channels
An analytic and experimental investigation into gaseous flow with slight rarefaction through long microchannels is undertaken in an attempt to obtain values of the Tangential Momentum Accommodation Coefficient (TMAC) for a common MicroElectroMechanical Systems (MEMS) surface. A set of analytic e...
| Main Author: | |
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| Format: | Technical Report |
| Language: | en_US |
| Published: |
Aerospace Computational Design Laboratory, Dept. of Aeronautics & Astronautics, Massachusetts Institute of Technology
2010
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| Online Access: | http://hdl.handle.net/1721.1/57611 |
| _version_ | 1811081420013043712 |
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| author | Arkilic, Errol B. |
| author_facet | Arkilic, Errol B. |
| author_sort | Arkilic, Errol B. |
| collection | MIT |
| description | An analytic and experimental investigation into gaseous
flow with slight rarefaction through long microchannels
is undertaken in an attempt to obtain values of the Tangential Momentum Accommodation Coefficient
(TMAC) for a common MicroElectroMechanical Systems (MEMS) surface. A set of analytic expressions is
developed from the slip-
flow solutions of the Navier Stokes equations which can be used to interpret the
results of
flow in micromachined channels and to extract TMAC values from these results. In addition
to the theoretical framework, a robust microchannel fabrication procedure and a dedicated high-resolution
mass
flow measurement technique is developed. These are used in conjunction to obtain TMAC values for
single-crystal silicon upon which a native oxide resides for gas
flows of argon, nitrogen and carbon dioxide.
It is shown that the TMAC for this common MEMS surface can possess a value less than unity (0.75-0.85)
for the conditions which are expected to be encountered with state-of-the-art MEMS. |
| first_indexed | 2024-09-23T11:46:23Z |
| format | Technical Report |
| id | mit-1721.1/57611 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T11:46:23Z |
| publishDate | 2010 |
| publisher | Aerospace Computational Design Laboratory, Dept. of Aeronautics & Astronautics, Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/576112019-04-10T10:25:06Z Measurement of the Mass Flow and Tangential Momentum Accommodation Coefficient in Silicon Micromachined Channels Arkilic, Errol B. An analytic and experimental investigation into gaseous flow with slight rarefaction through long microchannels is undertaken in an attempt to obtain values of the Tangential Momentum Accommodation Coefficient (TMAC) for a common MicroElectroMechanical Systems (MEMS) surface. A set of analytic expressions is developed from the slip- flow solutions of the Navier Stokes equations which can be used to interpret the results of flow in micromachined channels and to extract TMAC values from these results. In addition to the theoretical framework, a robust microchannel fabrication procedure and a dedicated high-resolution mass flow measurement technique is developed. These are used in conjunction to obtain TMAC values for single-crystal silicon upon which a native oxide resides for gas flows of argon, nitrogen and carbon dioxide. It is shown that the TMAC for this common MEMS surface can possess a value less than unity (0.75-0.85) for the conditions which are expected to be encountered with state-of-the-art MEMS. Financial support for this work was provided under DARPA contract #J-FB1-92-196 and Marty Schmidt's NSF Presidential Young Investigators award. Additional support for various hardware was provided for by AFOSR under contract #F49620-93-1-0194, monitored by James McMichael. Also, during the writing of this thesis I was supported by Physical Science Incorporated. 2010-08-27T20:12:36Z 2010-08-27T20:12:36Z 1997-01 Technical Report http://hdl.handle.net/1721.1/57611 en_US ACDL Technical Reports;FDRL TR-97-1 application/pdf Aerospace Computational Design Laboratory, Dept. of Aeronautics & Astronautics, Massachusetts Institute of Technology |
| spellingShingle | Arkilic, Errol B. Measurement of the Mass Flow and Tangential Momentum Accommodation Coefficient in Silicon Micromachined Channels |
| title | Measurement of the Mass Flow and Tangential Momentum Accommodation Coefficient in Silicon Micromachined Channels |
| title_full | Measurement of the Mass Flow and Tangential Momentum Accommodation Coefficient in Silicon Micromachined Channels |
| title_fullStr | Measurement of the Mass Flow and Tangential Momentum Accommodation Coefficient in Silicon Micromachined Channels |
| title_full_unstemmed | Measurement of the Mass Flow and Tangential Momentum Accommodation Coefficient in Silicon Micromachined Channels |
| title_short | Measurement of the Mass Flow and Tangential Momentum Accommodation Coefficient in Silicon Micromachined Channels |
| title_sort | measurement of the mass flow and tangential momentum accommodation coefficient in silicon micromachined channels |
| url | http://hdl.handle.net/1721.1/57611 |
| work_keys_str_mv | AT arkilicerrolb measurementofthemassflowandtangentialmomentumaccommodationcoefficientinsiliconmicromachinedchannels |