Measurement of the Mass Flow and Tangential Momentum Accommodation Coefficient in Silicon Micromachined Channels

Measurement of the Mass Flow and Tangential Momentum Accommodation Coefficient in Silicon Micromachined Channels

An analytic and experimental investigation into gaseous flow with slight rarefaction through long microchannels is undertaken in an attempt to obtain values of the Tangential Momentum Accommodation Coefficient (TMAC) for a common MicroElectroMechanical Systems (MEMS) surface. A set of analytic e...

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Bibliographic Details
Main Author:	Arkilic, Errol B.
Format:	Technical Report
Language:	en_US
Published:	Aerospace Computational Design Laboratory, Dept. of Aeronautics & Astronautics, Massachusetts Institute of Technology 2010
Online Access:	http://hdl.handle.net/1721.1/57611

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