Optimization of the holographic process for imaging and lithography

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2010.

Bibliographic Details
Main Author: Domínguez-Caballero, José Antonio
Other Authors: George Barbastathis.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2010
Subjects:
Online Access:http://hdl.handle.net/1721.1/57696