Optimization of the holographic process for imaging and lithography

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2010.

Detalhes bibliográficos
Autor principal:	Domínguez-Caballero, José Antonio
Outros Autores:	George Barbastathis.
Formato:	Tese
Idioma:	eng
Publicado em:	Massachusetts Institute of Technology 2010
Assuntos:	Mechanical Engineering.
Acesso em linha:	http://hdl.handle.net/1721.1/57696

Internet

http://hdl.handle.net/1721.1/57696