APA (7th ed.) Citation

Boning, D. S., Taylor, H. K., & Science, M. I. o. T. D. o. E. E. a. C. (2010). Towards nanoimprint lithography-aware layout design checking. SPIE.

Chicago Style (17th ed.) Citation

Boning, Duane S., Hayden Kingsley Taylor, and Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Towards Nanoimprint Lithography-aware Layout Design Checking. SPIE, 2010.

MLA (9th ed.) Citation

Boning, Duane S., et al. Towards Nanoimprint Lithography-aware Layout Design Checking. SPIE, 2010.