In-situ deposition of high-k dielectrics on III-V compound semiconductor in MOCVD system

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2010.

Bibliographic Details
Main Author:	Cheng, Cheng-Wei, Ph.D. Massachusetts Institute of Technology
Other Authors:	Eugene A. Fitzgerald.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2010
Subjects:	Materials Science and Engineering.
Online Access:	http://hdl.handle.net/1721.1/59216

Internet

http://hdl.handle.net/1721.1/59216