Optical loss reduction in HIC chalcogenide glass waveguides via thermal reflow

A rapid thermal reflow technique is applied to high-index-contrast, sub-micron waveguides in As[subscript 2]S[subscript 3] chalcogenide glass to reduce sidewall roughness and associated optical scattering loss. Up to 50% optical loss reduction after reflow treatment is achieved.

Bibliographic Details
Main Authors: Hu, Juejun, Feng, Ning-Ning, Agarwal, Anuradha Murthy, Kimerling, Lionel C., Carlie, Nathan, Petit, Laeticia, Richardson, Kathleen
Other Authors: MIT Materials Research Laboratory
Format: Article
Language:en_US
Published: Institute of Electrical and Electronics Engineers 2010
Online Access:http://hdl.handle.net/1721.1/59388
https://orcid.org/0000-0002-7233-3918
https://orcid.org/0000-0002-3913-6189