Silver nanoparticle structures realized by digital surface micromachining

We report a new surface micromachining process using commercial silver nanoparticle inks and digital fabrication methods. This process is entirely digital (non-lithographic patterning), the feature sizes can be <20 mum, and the maximum temperature is less than 250degC. Furthermore, we have comple...

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Bibliographic Details
Main Authors: Schmidt, Martin Arnold, Lam, Eric Wing-Jing, Li, Hanqing
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: Institute of Electrical and Electronics Engineers 2010
Subjects:
Online Access:http://hdl.handle.net/1721.1/59526
https://orcid.org/0000-0002-0828-2220
https://orcid.org/0000-0001-7322-7490