Silver nanoparticle structures realized by digital surface micromachining
We report a new surface micromachining process using commercial silver nanoparticle inks and digital fabrication methods. This process is entirely digital (non-lithographic patterning), the feature sizes can be <20 mum, and the maximum temperature is less than 250degC. Furthermore, we have comple...
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| Format: | Article |
| Language: | en_US |
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Institute of Electrical and Electronics Engineers
2010
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| Online Access: | http://hdl.handle.net/1721.1/59526 https://orcid.org/0000-0002-0828-2220 https://orcid.org/0000-0001-7322-7490 |
| _version_ | 1811084144445227008 |
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| author | Schmidt, Martin Arnold Lam, Eric Wing-Jing Li, Hanqing |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Schmidt, Martin Arnold Lam, Eric Wing-Jing Li, Hanqing |
| author_sort | Schmidt, Martin Arnold |
| collection | MIT |
| description | We report a new surface micromachining process using commercial silver nanoparticle inks and digital fabrication methods. This process is entirely digital (non-lithographic patterning), the feature sizes can be <20 mum, and the maximum temperature is less than 250degC. Furthermore, we have completed materials property characterization in order to enable design in this process. As a demonstration, silver cantilevers were fabricated using this process and subsequently characterized to determine the silver film's mechanical properties. |
| first_indexed | 2024-09-23T12:45:38Z |
| format | Article |
| id | mit-1721.1/59526 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T12:45:38Z |
| publishDate | 2010 |
| publisher | Institute of Electrical and Electronics Engineers |
| record_format | dspace |
| spelling | mit-1721.1/595262022-10-01T10:54:55Z Silver nanoparticle structures realized by digital surface micromachining Schmidt, Martin Arnold Lam, Eric Wing-Jing Li, Hanqing Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology. Microsystems Technology Laboratories Schmidt, Martin Arnold Schmidt, Martin Arnold Lam, Eric Wing-Jing Li, Hanqing MEMS Inkjet Nanoparticles Printing We report a new surface micromachining process using commercial silver nanoparticle inks and digital fabrication methods. This process is entirely digital (non-lithographic patterning), the feature sizes can be <20 mum, and the maximum temperature is less than 250degC. Furthermore, we have completed materials property characterization in order to enable design in this process. As a demonstration, silver cantilevers were fabricated using this process and subsequently characterized to determine the silver film's mechanical properties. United States. Defense Advanced Research Projects Agency (N/MEMS Fundamentals Program) Hewlett-Packard Company 2010-10-26T18:14:27Z 2010-10-26T18:14:27Z 2009-10 2009-06 Article http://purl.org/eprint/type/JournalArticle 978-1-4244-4193-8 978-1-4244-4190-7 INSPEC Accession Number: 10917082 http://hdl.handle.net/1721.1/59526 Lam, E.W., H. Li, and M.A. Schmidt. “Silver nanoparticle structures realized by digital surface micromachining.” Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International. 2009. 1698-1701. ©2009 Institute of Electrical and Electronics Engineers. https://orcid.org/0000-0002-0828-2220 https://orcid.org/0000-0001-7322-7490 en_US http://dx.doi.org/10.1109/SENSOR.2009.5285759 International Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009 Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Institute of Electrical and Electronics Engineers IEEE |
| spellingShingle | MEMS Inkjet Nanoparticles Printing Schmidt, Martin Arnold Lam, Eric Wing-Jing Li, Hanqing Silver nanoparticle structures realized by digital surface micromachining |
| title | Silver nanoparticle structures realized by digital surface micromachining |
| title_full | Silver nanoparticle structures realized by digital surface micromachining |
| title_fullStr | Silver nanoparticle structures realized by digital surface micromachining |
| title_full_unstemmed | Silver nanoparticle structures realized by digital surface micromachining |
| title_short | Silver nanoparticle structures realized by digital surface micromachining |
| title_sort | silver nanoparticle structures realized by digital surface micromachining |
| topic | MEMS Inkjet Nanoparticles Printing |
| url | http://hdl.handle.net/1721.1/59526 https://orcid.org/0000-0002-0828-2220 https://orcid.org/0000-0001-7322-7490 |
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