Silver nanoparticle structures realized by digital surface micromachining
We report a new surface micromachining process using commercial silver nanoparticle inks and digital fabrication methods. This process is entirely digital (non-lithographic patterning), the feature sizes can be <20 mum, and the maximum temperature is less than 250degC. Furthermore, we have comple...
Main Authors: | Schmidt, Martin Arnold, Lam, Eric Wing-Jing, Li, Hanqing |
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Other Authors: | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
Format: | Article |
Language: | en_US |
Published: |
Institute of Electrical and Electronics Engineers
2010
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Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/59526 https://orcid.org/0000-0002-0828-2220 https://orcid.org/0000-0001-7322-7490 |
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