Development and characterization of an iodine field emission ion source for FIB applications
Emission of positive and negative ions is possible when a room temperature molten salt, or ionic liquid, is exposed to a sufficiently high electric field. Ionic liquid ion sources (ILIS) have shown potential to be used in various focused ion beam (FIB) applications, since their operation and char...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
American Vacuum Society
2010
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| Online Access: | http://hdl.handle.net/1721.1/60026 https://orcid.org/0000-0002-6063-3227 |