Contact resistance in flat thin films
MEMS-fabricated electrical contacts are commonly used in MEMS relays. These electrical contacts can be as simple as two flat surfaces coming into contact [1]. Modeling their contact force/resistance relationship can be difficult because much of the theory on contact resistance was developed for...
| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
Institute of Electrical and Electronics Engineers
2010
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| Online Access: | http://hdl.handle.net/1721.1/60268 https://orcid.org/0000-0002-5048-4109 https://orcid.org/0000-0002-5765-4369 |