Grids for Applications in High-Temperature High-Resolution Transmission Electron Microscopy
New TEM grids coated with ultrathin amorphous Al2O3 films have been developed using atomic layer deposition technique. The amorphous Al2O3 films can withstand temperatures over 600∘C in air and 900∘C in vacuum when the thickness of the Al2O3 film is 2 nm, and up to 1000∘C in air when the thickness i...
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
Hindawi Pub. Corp.
2011
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| Online Access: | http://hdl.handle.net/1721.1/61384 https://orcid.org/0000-0002-3968-8530 |