Hybridization process for back-illuminated silicon Geiger-mode avalanche photodiode arrays

Hybridization process for back-illuminated silicon Geiger-mode avalanche photodiode arrays

We present a unique hybridization process that permits high-performance back-illuminated silicon Geiger-mode avalanche photodiodes (GM-APDs) to be bonded to custom CMOS readout integrated circuits (ROICs) - a hybridization approach that enables independent optimization of the GM-APD arrays and the R...

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Bibliographic Details
Main Authors: Schuette, Daniel R., Westhoff, Richard C., Loomis, Andrew H., Young, Douglas J., Ciampi, Joseph S., Aull, Brian F., Reich, Robert K.
Other Authors: Lincoln Laboratory
Format: Article
Language:en_US
Published: SPIE 2011
Online Access:http://hdl.handle.net/1721.1/61643
https://orcid.org/0000-0002-8392-5468

Internet

http://hdl.handle.net/1721.1/61643
https://orcid.org/0000-0002-8392-5468

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