A precision manipulation system for polymer microdevice production

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2010.

Bibliographic Details
Main Author: Zarrouati, Nadège
Other Authors: Brian W. Anthony.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2011
Subjects:
Online Access:http://hdl.handle.net/1721.1/61927