Environmentally focused patterning and processing of polymer thin films by initiated chemical vapor deposition (iCVD) and oxidative chemical vapor deposition (oCVD)

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2010.

Bibliographic Details
Main Author:	Trujillo, Nathan J. (Nathan Jeffrey)
Other Authors:	Karen K. Gleason.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2011
Subjects:	Chemical Engineering.
Online Access:	http://hdl.handle.net/1721.1/62139

Internet

http://hdl.handle.net/1721.1/62139