Elements for the design of precision machine tools and their application to a prototype 450mm Si-wafer grinder

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2010.

Bibliographic Details
Main Author:	Rothenhöfer, Gerald S. (Gerald Sven)
Other Authors:	Alexander H. Slocum.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2011
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/62516

Internet

http://hdl.handle.net/1721.1/62516