Lifetime of high-k gate dielectrics and analogy with strength of quasibrittle structures

The two-parameter Weibull distribution has been widely adopted to model the lifetime statistics of dielectric breakdown under constant voltage, but recent lifetime testing for high-k gate dielectrics has revealed a systematic departure from Weibull statistics, evocative of lifetime statistics for sm...

Full description

Bibliographic Details
Main Authors: Le, Jia-Liang, Bazant, Zdenek P., Bazant, Martin Z.
Other Authors: Massachusetts Institute of Technology. Department of Chemical Engineering
Format: Article
Language:en_US
Published: American Institute of Physics 2011
Online Access:http://hdl.handle.net/1721.1/63693