An on-chip test circuit for characterization of MEMS resonators

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2011.

书目详细资料
主要作者: Lee, John Haeseon
其他作者: Duane S. Boning.
格式: Thesis
语言:eng
出版: Massachusetts Institute of Technology 2011
主题:
在线阅读:http://hdl.handle.net/1721.1/66034