An on-chip test circuit for characterization of MEMS resonators

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2011.

Bibliographic Details
Main Author:	Lee, John Haeseon
Other Authors:	Duane S. Boning.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2011
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/66034

Internet

http://hdl.handle.net/1721.1/66034