Feasibility study on bonding quality inspection of microfluidic devices by optical coherence tomography
This paper reports the feasibility of optical coherence tomography (OCT) technology for inspection of bonding quality of microfluidic devices in manufacturing environments. A compact optical-fiber–based OCT is developed and its measurement performance is characterized. A series of microfluidic devic...
| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
Society of Photo-optical Instrumentation Engineers
2011
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| Online Access: | http://hdl.handle.net/1721.1/66996 |