The Effect of Electrostatic Screening on a Nanometer Scale Electrometer
We investigate the effect of electrostatic screening on a nanoscale silicon MOSFET electrometer. We find that screening by the lightly doped p-type substrate, on which the MOSFET is fabricated, significantly affects the sensitivity of the device. We are able to tune the rate and magnitude of the scr...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
American Chemical Society
2011
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| Online Access: | http://hdl.handle.net/1721.1/67690 https://orcid.org/0000-0001-7641-5438 |