Acoustic Bragg reflectors for Q-enhancement of unreleased MEMS resonators

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2011.

Bibliographic Details
Main Author:	Wang, Wentao, Ph.D. Massachusetts Institute of Technology
Other Authors:	Dana Weinstein and Carol Livermore.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2011
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/67806

Internet

http://hdl.handle.net/1721.1/67806