Scratching by pad asperities in chemical mechanical polishing
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2011.
Main Author: | Roberts, Michael P. (Michael Philip) |
---|---|
Other Authors: | Jung-Hoon Chun. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2012
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Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/68855 |
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