Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results
Size reduction in quadrupole mass spectrometers (QMSs) is an ongoing requirement driven by the needs of space exploration, portable, and covert monitoring applications. Microelectromechanical systems (MEMS) technology provides a method of achieving this size reduction. A quadrupole mass filter (QMF)...
| Main Authors: | , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
Institute of Electrical and Electronics Engineers (IEEE)
2012
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| Online Access: | http://hdl.handle.net/1721.1/69023 https://orcid.org/0000-0003-3001-9223 |