Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results

Size reduction in quadrupole mass spectrometers (QMSs) is an ongoing requirement driven by the needs of space exploration, portable, and covert monitoring applications. Microelectromechanical systems (MEMS) technology provides a method of achieving this size reduction. A quadrupole mass filter (QMF)...

Full description

Bibliographic Details
Main Authors: Hogan, Thomas J., Taylor, Stephen, Pedder, Randall E., Cheung, Kerry, Velasquez-Heller, Luis Fernand, Akinwande, Akintunde Ibitayo
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: Institute of Electrical and Electronics Engineers (IEEE) 2012
Online Access:http://hdl.handle.net/1721.1/69023
https://orcid.org/0000-0003-3001-9223
_version_ 1826202140615376896
author Hogan, Thomas J.
Taylor, Stephen
Pedder, Randall E.
Cheung, Kerry
Velasquez-Heller, Luis Fernand
Akinwande, Akintunde Ibitayo
author2 Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
author_facet Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Hogan, Thomas J.
Taylor, Stephen
Pedder, Randall E.
Cheung, Kerry
Velasquez-Heller, Luis Fernand
Akinwande, Akintunde Ibitayo
author_sort Hogan, Thomas J.
collection MIT
description Size reduction in quadrupole mass spectrometers (QMSs) is an ongoing requirement driven by the needs of space exploration, portable, and covert monitoring applications. Microelectromechanical systems (MEMS) technology provides a method of achieving this size reduction. A quadrupole mass filter (QMF) is one component of a QMS and is suitable for microfabrication. MEMS manufacturing techniques are more suitable to the production of rectilinear electrodes, instead of the more widely used circular electrodes. Present understanding of the performance characteristics of rectilinear electrodes and the dependence of these characteristics on electrode geometry are not well documented. In this paper, we report on the performance characteristics of a square-electrode QMF. Both the predicted performances obtained by computer simulation and experimental data are presented for operation in stability zone 1 (0.236, 0.706) and zone 3 (3.16, 3.23). A comparison between these results and the simulated data for equivalent devices constructed using hyperbolic and circular electrodes for operation in zone 1 is also made. This comparison demonstrates that, although the field produced by square electrodes is far from the “ideal,” it is still possible to achieve useful filtering action. Our results also show that, for operation in zone 3, performance comparable with that of hyperbolic and circular electrodes operating in zone 1 is achievable.
first_indexed 2024-09-23T12:02:30Z
format Article
id mit-1721.1/69023
institution Massachusetts Institute of Technology
language en_US
last_indexed 2024-09-23T12:02:30Z
publishDate 2012
publisher Institute of Electrical and Electronics Engineers (IEEE)
record_format dspace
spelling mit-1721.1/690232022-09-27T23:42:30Z Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results Hogan, Thomas J. Taylor, Stephen Pedder, Randall E. Cheung, Kerry Velasquez-Heller, Luis Fernand Akinwande, Akintunde Ibitayo Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology. Microsystems Technology Laboratories Akinwande, Akintunde I. Cheung, Kerry Velasquez-Heller, Luis Fernand Akinwande, Akintunde Ibitayo Size reduction in quadrupole mass spectrometers (QMSs) is an ongoing requirement driven by the needs of space exploration, portable, and covert monitoring applications. Microelectromechanical systems (MEMS) technology provides a method of achieving this size reduction. A quadrupole mass filter (QMF) is one component of a QMS and is suitable for microfabrication. MEMS manufacturing techniques are more suitable to the production of rectilinear electrodes, instead of the more widely used circular electrodes. Present understanding of the performance characteristics of rectilinear electrodes and the dependence of these characteristics on electrode geometry are not well documented. In this paper, we report on the performance characteristics of a square-electrode QMF. Both the predicted performances obtained by computer simulation and experimental data are presented for operation in stability zone 1 (0.236, 0.706) and zone 3 (3.16, 3.23). A comparison between these results and the simulated data for equivalent devices constructed using hyperbolic and circular electrodes for operation in zone 1 is also made. This comparison demonstrates that, although the field produced by square electrodes is far from the “ideal,” it is still possible to achieve useful filtering action. Our results also show that, for operation in zone 3, performance comparable with that of hyperbolic and circular electrodes operating in zone 1 is achievable. 2012-02-03T18:39:54Z 2012-02-03T18:39:54Z 2010-08 2009-09 Article http://purl.org/eprint/type/JournalArticle 0018-9456 1557-9662 INSPEC Accession Number: 11464117 http://hdl.handle.net/1721.1/69023 Hogan, Thomas J et al. “Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results.” IEEE Transactions on Instrumentation and Measurement 59.9 (2010): 2458-2467. Web. 3 Feb. 2012. © 2010 Institute of Electrical and Electronics Engineers https://orcid.org/0000-0003-3001-9223 en_US http://dx.doi.org/10.1109/tim.2009.2036346 IEEE Transactions on Instrumentation and Measurement Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Institute of Electrical and Electronics Engineers (IEEE) IEEE
spellingShingle Hogan, Thomas J.
Taylor, Stephen
Pedder, Randall E.
Cheung, Kerry
Velasquez-Heller, Luis Fernand
Akinwande, Akintunde Ibitayo
Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results
title Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results
title_full Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results
title_fullStr Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results
title_full_unstemmed Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results
title_short Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results
title_sort performance characteristics of a mems quadrupole mass filter with square electrodes experimental and simulated results
url http://hdl.handle.net/1721.1/69023
https://orcid.org/0000-0003-3001-9223
work_keys_str_mv AT hoganthomasj performancecharacteristicsofamemsquadrupolemassfilterwithsquareelectrodesexperimentalandsimulatedresults
AT taylorstephen performancecharacteristicsofamemsquadrupolemassfilterwithsquareelectrodesexperimentalandsimulatedresults
AT pedderrandalle performancecharacteristicsofamemsquadrupolemassfilterwithsquareelectrodesexperimentalandsimulatedresults
AT cheungkerry performancecharacteristicsofamemsquadrupolemassfilterwithsquareelectrodesexperimentalandsimulatedresults
AT velasquezhellerluisfernand performancecharacteristicsofamemsquadrupolemassfilterwithsquareelectrodesexperimentalandsimulatedresults
AT akinwandeakintundeibitayo performancecharacteristicsofamemsquadrupolemassfilterwithsquareelectrodesexperimentalandsimulatedresults