Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results
Size reduction in quadrupole mass spectrometers (QMSs) is an ongoing requirement driven by the needs of space exploration, portable, and covert monitoring applications. Microelectromechanical systems (MEMS) technology provides a method of achieving this size reduction. A quadrupole mass filter (QMF)...
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| Format: | Article |
| Sprog: | en_US |
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Institute of Electrical and Electronics Engineers (IEEE)
2012
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| Online adgang: | http://hdl.handle.net/1721.1/69023 https://orcid.org/0000-0003-3001-9223 |
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| author | Hogan, Thomas J. Taylor, Stephen Pedder, Randall E. Cheung, Kerry Velasquez-Heller, Luis Fernand Akinwande, Akintunde Ibitayo |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Hogan, Thomas J. Taylor, Stephen Pedder, Randall E. Cheung, Kerry Velasquez-Heller, Luis Fernand Akinwande, Akintunde Ibitayo |
| author_sort | Hogan, Thomas J. |
| collection | MIT |
| description | Size reduction in quadrupole mass spectrometers (QMSs) is an ongoing requirement driven by the needs of space exploration, portable, and covert monitoring applications. Microelectromechanical systems (MEMS) technology provides a method of achieving this size reduction. A quadrupole mass filter (QMF) is one component of a QMS and is suitable for microfabrication. MEMS manufacturing techniques are more suitable to the production of rectilinear electrodes, instead of the more widely used circular electrodes. Present understanding of the performance characteristics of rectilinear electrodes and the dependence of these characteristics on electrode geometry are not well documented. In this paper, we report on the performance characteristics of a square-electrode QMF. Both the predicted performances obtained by computer simulation and experimental data are presented for operation in stability zone 1 (0.236, 0.706) and zone 3 (3.16, 3.23). A comparison between these results and the simulated data for equivalent devices constructed using hyperbolic and circular electrodes for operation in zone 1 is also made. This comparison demonstrates that, although the field produced by square electrodes is far from the “ideal,” it is still possible to achieve useful filtering action. Our results also show that, for operation in zone 3, performance comparable with that of hyperbolic and circular electrodes operating in zone 1 is achievable. |
| first_indexed | 2024-09-23T12:02:30Z |
| format | Article |
| id | mit-1721.1/69023 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T12:02:30Z |
| publishDate | 2012 |
| publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| record_format | dspace |
| spelling | mit-1721.1/690232022-09-27T23:42:30Z Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results Hogan, Thomas J. Taylor, Stephen Pedder, Randall E. Cheung, Kerry Velasquez-Heller, Luis Fernand Akinwande, Akintunde Ibitayo Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology. Microsystems Technology Laboratories Akinwande, Akintunde I. Cheung, Kerry Velasquez-Heller, Luis Fernand Akinwande, Akintunde Ibitayo Size reduction in quadrupole mass spectrometers (QMSs) is an ongoing requirement driven by the needs of space exploration, portable, and covert monitoring applications. Microelectromechanical systems (MEMS) technology provides a method of achieving this size reduction. A quadrupole mass filter (QMF) is one component of a QMS and is suitable for microfabrication. MEMS manufacturing techniques are more suitable to the production of rectilinear electrodes, instead of the more widely used circular electrodes. Present understanding of the performance characteristics of rectilinear electrodes and the dependence of these characteristics on electrode geometry are not well documented. In this paper, we report on the performance characteristics of a square-electrode QMF. Both the predicted performances obtained by computer simulation and experimental data are presented for operation in stability zone 1 (0.236, 0.706) and zone 3 (3.16, 3.23). A comparison between these results and the simulated data for equivalent devices constructed using hyperbolic and circular electrodes for operation in zone 1 is also made. This comparison demonstrates that, although the field produced by square electrodes is far from the “ideal,” it is still possible to achieve useful filtering action. Our results also show that, for operation in zone 3, performance comparable with that of hyperbolic and circular electrodes operating in zone 1 is achievable. 2012-02-03T18:39:54Z 2012-02-03T18:39:54Z 2010-08 2009-09 Article http://purl.org/eprint/type/JournalArticle 0018-9456 1557-9662 INSPEC Accession Number: 11464117 http://hdl.handle.net/1721.1/69023 Hogan, Thomas J et al. “Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results.” IEEE Transactions on Instrumentation and Measurement 59.9 (2010): 2458-2467. Web. 3 Feb. 2012. © 2010 Institute of Electrical and Electronics Engineers https://orcid.org/0000-0003-3001-9223 en_US http://dx.doi.org/10.1109/tim.2009.2036346 IEEE Transactions on Instrumentation and Measurement Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Institute of Electrical and Electronics Engineers (IEEE) IEEE |
| spellingShingle | Hogan, Thomas J. Taylor, Stephen Pedder, Randall E. Cheung, Kerry Velasquez-Heller, Luis Fernand Akinwande, Akintunde Ibitayo Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results |
| title | Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results |
| title_full | Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results |
| title_fullStr | Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results |
| title_full_unstemmed | Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results |
| title_short | Performance Characteristics of a MEMS Quadrupole Mass Filter With Square Electrodes: Experimental and Simulated Results |
| title_sort | performance characteristics of a mems quadrupole mass filter with square electrodes experimental and simulated results |
| url | http://hdl.handle.net/1721.1/69023 https://orcid.org/0000-0003-3001-9223 |
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