Polycrystalline Si thin films and devices : I. Seed selection through ion channeling II. Thin-film transistors

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1988.

Bibliographic Details
Main Author: Kung, Kenneth Ting-Yuan
Other Authors: Rafael Reif.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2012
Subjects:
Online Access:http://hdl.handle.net/1721.1/69699