High-performance MEMS square electrode quadrupole mass filters for chip-scale mass spectrometry

We report exciting experimental data from a low-cost, high-performance square electrode quadrupole mass filter with integrated ion optics intended for chips-cale mass spectrometry. The device showed a mass range of 650 amu and a maximum resolution of ~80, metrics that are comparable to the state-of-...

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Bibliographic Details
Main Authors: Cheung, Kerry, Velasquez-Heller, Luis Fernand, Akinwande, Akintunde Ibitayo
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: Institute of Electrical and Electronics Engineers (IEEE) 2012
Online Access:http://hdl.handle.net/1721.1/69930
https://orcid.org/0000-0003-3001-9223