High-performance MEMS square electrode quadrupole mass filters for chip-scale mass spectrometry
We report exciting experimental data from a low-cost, high-performance square electrode quadrupole mass filter with integrated ion optics intended for chips-cale mass spectrometry. The device showed a mass range of 650 amu and a maximum resolution of ~80, metrics that are comparable to the state-of-...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
Institute of Electrical and Electronics Engineers (IEEE)
2012
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| Online Access: | http://hdl.handle.net/1721.1/69930 https://orcid.org/0000-0003-3001-9223 |