Design of a hermetically sealed MEMS resonator with electrostatic actuation and capacitive third harmonic sensing

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012.

Bibliographic Details
Main Author:	Newton, Eric B
Other Authors:	Carol Livermore.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2012
Subjects:	Mechanical Engineering.
Online Access:	http://hdl.handle.net/1721.1/70438

Internet

http://hdl.handle.net/1721.1/70438