Design of a hermetically sealed MEMS resonator with electrostatic actuation and capacitive third harmonic sensing

Design of a hermetically sealed MEMS resonator with electrostatic actuation and capacitive third harmonic sensing

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012.

Detalhes bibliográficos
Autor principal: Newton, Eric B
Outros Autores: Carol Livermore.
Formato: Tese
Idioma:eng
Publicado em: Massachusetts Institute of Technology 2012
Assuntos:
Mechanical Engineering.
Acesso em linha:http://hdl.handle.net/1721.1/70438

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