Piezoelectric Ultrasonic Micromotors
This report describes development of micro-fabricated piezoelectric ultrasonic motors and bulk-ceramic piezoelectric ultrasonic motors. Ultrasonic motors offer the advantage of low speed, high torque operation without the need for gears. They can be made compact and lightweight and provide a ho...
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| Language: | en_US |
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2004
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| Online Access: | http://hdl.handle.net/1721.1/7086 |