CNT-based MEMS/NEMS gas ionizers for portable mass spectrometry applications

CNT-based MEMS/NEMS gas ionizers for portable mass spectrometry applications

We report the fabrication and experimental characterization of a carbon nanotube (CNT)-based MEMS/NEMS electron impact gas ionizer with an integrated extractor gate for portable mass spectrometry. The ionizer achieves low-voltage ionization using sparse forests of plasma-enhanced chemical-vapor-depo...

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Bibliographic Details
Main Authors: Velasquez-Heller, Luis Fernand, Gassend, Blaise, Akinwande, Akintunde Ibitayo
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: Institute of Electrical and Electronics Engineers (IEEE) 2012
Online Access:http://hdl.handle.net/1721.1/70945
https://orcid.org/0000-0003-3001-9223

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http://hdl.handle.net/1721.1/70945
https://orcid.org/0000-0003-3001-9223

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