CNT-based MEMS/NEMS gas ionizers for portable mass spectrometry applications

CNT-based MEMS/NEMS gas ionizers for portable mass spectrometry applications

We report the fabrication and experimental characterization of a carbon nanotube (CNT)-based MEMS/NEMS electron impact gas ionizer with an integrated extractor gate for portable mass spectrometry. The ionizer achieves low-voltage ionization using sparse forests of plasma-enhanced chemical-vapor-depo...

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Bibliographic Details
Main Authors:	Velasquez-Heller, Luis Fernand, Gassend, Blaise, Akinwande, Akintunde Ibitayo
Other Authors:	Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format:	Article
Language:	en_US
Published:	Institute of Electrical and Electronics Engineers (IEEE) 2012
Online Access:	http://hdl.handle.net/1721.1/70945 https://orcid.org/0000-0003-3001-9223

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