Large-area and high-resolution distortion measurement based on moire fringe method for hot embossing process

A moiré fringe approach is developed to identify simultaneously the global and local distortions in hot-embossed polymeric samples. A square grid pattern with a pitch of 63.5 μm is hot-embossed on the polymer substrate. When a reference grid, a polymeric film with the same pattern, is placed on top...

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Bibliographic Details
Main Authors: Boning, Duane S., Taylor, Hayden Kingsley, Youcef-Toumi, Kamal, Xu, Zhiguang, Yoon, Soon Fatt
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: Optical Society of America 2012
Online Access:http://hdl.handle.net/1721.1/71162
https://orcid.org/0000-0002-0417-445X