Lifetime estimation of intrinsic silicon nitride MIM capacitors in a gan MMIC process

CS MANTECH Conference, May 18th-21st, 2009, Tampa, Florida, USA

Bibliographic Details
Main Authors:	Demirtas, Sefa, del Alamo, Jesus A., Gajewski, Donald A., Hanson, Allen
Other Authors:	Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format:	Article
Language:	en_US
Published:	CS ManTech 2012
Online Access:	http://hdl.handle.net/1721.1/71582

Internet

http://hdl.handle.net/1721.1/71582