Lifetime estimation of intrinsic silicon nitride MIM capacitors in a gan MMIC process
CS MANTECH Conference, May 18th-21st, 2009, Tampa, Florida, USA
| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
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CS ManTech
2012
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| Online Access: | http://hdl.handle.net/1721.1/71582 |
| _version_ | 1811079554507210752 |
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| author | Demirtas, Sefa del Alamo, Jesus A. Gajewski, Donald A. Hanson, Allen |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Demirtas, Sefa del Alamo, Jesus A. Gajewski, Donald A. Hanson, Allen |
| author_sort | Demirtas, Sefa |
| collection | MIT |
| description | CS MANTECH Conference, May 18th-21st, 2009, Tampa, Florida, USA |
| first_indexed | 2024-09-23T11:16:52Z |
| format | Article |
| id | mit-1721.1/71582 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T11:16:52Z |
| publishDate | 2012 |
| publisher | CS ManTech |
| record_format | dspace |
| spelling | mit-1721.1/715822022-10-01T02:32:35Z Lifetime estimation of intrinsic silicon nitride MIM capacitors in a gan MMIC process Demirtas, Sefa del Alamo, Jesus A. Gajewski, Donald A. Hanson, Allen Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science del Alamo, Jesus A. Demirtas, Sefa del Alamo, Jesus A. CS MANTECH Conference, May 18th-21st, 2009, Tampa, Florida, USA We have studied the reliability of intrinsic SiN MIM capacitors designed for 48 V and 125 [superscript 0]C operation and manufactured in a GaN process flow. It is shown that very small area capacitors (10um x 10um) with a dielectric thickness of 400nm exhibit lifetimes as long as 1.48E10 hours under such conditions. 2012-07-11T15:41:46Z 2012-07-11T15:41:46Z 2009-05 Article http://purl.org/eprint/type/ConferencePaper http://hdl.handle.net/1721.1/71582 Demirtas, Sefa, et al. "Lifetime estimation of intrinsic silicon nitride MIM capacitors in a gan MMIC process." CS MANTECH Conference, May 18th-21st, 2009, Tampa, Florida, USA http://www.csmantech.org/Digests/2009/2009%20Papers/4.2.pdf en_US http://www.csmantech.org/Digests/2009/2009%20Papers/4.2.pdf International Conference on Compound Semiconductor Manufacturing Technology (2009 On-line Digest) Creative Commons Attribution-Noncommercial-Share Alike 3.0 http://creativecommons.org/licenses/by-nc-sa/3.0/ application/pdf CS ManTech del Alamo via Amy Stout |
| spellingShingle | Demirtas, Sefa del Alamo, Jesus A. Gajewski, Donald A. Hanson, Allen Lifetime estimation of intrinsic silicon nitride MIM capacitors in a gan MMIC process |
| title | Lifetime estimation of intrinsic silicon nitride MIM capacitors in a gan MMIC process |
| title_full | Lifetime estimation of intrinsic silicon nitride MIM capacitors in a gan MMIC process |
| title_fullStr | Lifetime estimation of intrinsic silicon nitride MIM capacitors in a gan MMIC process |
| title_full_unstemmed | Lifetime estimation of intrinsic silicon nitride MIM capacitors in a gan MMIC process |
| title_short | Lifetime estimation of intrinsic silicon nitride MIM capacitors in a gan MMIC process |
| title_sort | lifetime estimation of intrinsic silicon nitride mim capacitors in a gan mmic process |
| url | http://hdl.handle.net/1721.1/71582 |
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