Lifetime estimation of intrinsic silicon nitride MIM capacitors in a gan MMIC process

Lifetime estimation of intrinsic silicon nitride MIM capacitors in a gan MMIC process

CS MANTECH Conference, May 18th-21st, 2009, Tampa, Florida, USA

Bibliographic Details
Main Authors: Demirtas, Sefa, del Alamo, Jesus A., Gajewski, Donald A., Hanson, Allen
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Format: Article
Language:en_US
Published: CS ManTech 2012
Online Access:http://hdl.handle.net/1721.1/71582

Similar Items

Similar Items