CNT-based gas ionizers with integrated MEMS gate for portable mass spectrometry applications
We report the fabrication and experimental characterization of a novel low-cost carbon nanotube (CNT)-based electron impact ionizer (EII) with integrated gate for portable mass spectrometry applications. The device achieves low-voltage ionization using sparse forests of plasma-enhanced chemical vapo...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Article |
| Language: | en_US |
| Published: |
Institute of Electrical and Electronics Engineers
2012
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| Online Access: | http://hdl.handle.net/1721.1/72044 https://orcid.org/0000-0003-3001-9223 |