CNT-based gas ionizers with integrated MEMS gate for portable mass spectrometry applications
We report the fabrication and experimental characterization of a novel low-cost carbon nanotube (CNT)-based electron impact ionizer (EII) with integrated gate for portable mass spectrometry applications. The device achieves low-voltage ionization using sparse forests of plasma-enhanced chemical vapo...
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| Format: | Article |
| Language: | en_US |
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Institute of Electrical and Electronics Engineers
2012
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| Online Access: | http://hdl.handle.net/1721.1/72044 https://orcid.org/0000-0003-3001-9223 |
| _version_ | 1811078029749780480 |
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| author | Velasquez-Garcia, Luis Fernando Gassend, Blaise Akinwande, Akintunde Ibitayo |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Velasquez-Garcia, Luis Fernando Gassend, Blaise Akinwande, Akintunde Ibitayo |
| author_sort | Velasquez-Garcia, Luis Fernando |
| collection | MIT |
| description | We report the fabrication and experimental characterization of a novel low-cost carbon nanotube (CNT)-based electron impact ionizer (EII) with integrated gate for portable mass spectrometry applications. The device achieves low-voltage ionization using sparse forests of plasma-enhanced chemical vapor deposited (PECVD) CNTs field emitter tips, and a proximal gate with open apertures to facilitate electron transmission. The gate is integrated using a deep reactive ion etched (DRIE) spring-based high-voltage MEMS packaging technology. The device also includes a high aspect-ratio silicon structure (mufoam) that facilitates sparse CNT growth and limits the electron current per emitter. The devices were tested as field emitters in high vacuum (10-8 Torr). Electron emission starts at a gate voltage of 110 V, and reaches a current of 9 uA at 250 V (2.25 mW) with more than 55% of the electrons transmitted through the gate apertures. The devices were also tested as electron impact ionizers using argon. The experimental data demonstrates that the CNT-EIIs can operate at mtorr-level pressures while delivering 60 nA of ion current at 250 V with about 1% ionization efficiency. |
| first_indexed | 2024-09-23T10:52:17Z |
| format | Article |
| id | mit-1721.1/72044 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T10:52:17Z |
| publishDate | 2012 |
| publisher | Institute of Electrical and Electronics Engineers |
| record_format | dspace |
| spelling | mit-1721.1/720442022-09-27T15:35:05Z CNT-based gas ionizers with integrated MEMS gate for portable mass spectrometry applications Velasquez-Garcia, Luis Fernando Gassend, Blaise Akinwande, Akintunde Ibitayo Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology. Microsystems Technology Laboratories Akinwande, Akintunde Ibitayo Akinwande, Akintunde Ibitayo Velasquez-Garcia, Luis Fernando We report the fabrication and experimental characterization of a novel low-cost carbon nanotube (CNT)-based electron impact ionizer (EII) with integrated gate for portable mass spectrometry applications. The device achieves low-voltage ionization using sparse forests of plasma-enhanced chemical vapor deposited (PECVD) CNTs field emitter tips, and a proximal gate with open apertures to facilitate electron transmission. The gate is integrated using a deep reactive ion etched (DRIE) spring-based high-voltage MEMS packaging technology. The device also includes a high aspect-ratio silicon structure (mufoam) that facilitates sparse CNT growth and limits the electron current per emitter. The devices were tested as field emitters in high vacuum (10-8 Torr). Electron emission starts at a gate voltage of 110 V, and reaches a current of 9 uA at 250 V (2.25 mW) with more than 55% of the electrons transmitted through the gate apertures. The devices were also tested as electron impact ionizers using argon. The experimental data demonstrates that the CNT-EIIs can operate at mtorr-level pressures while delivering 60 nA of ion current at 250 V with about 1% ionization efficiency. 2012-08-08T19:24:18Z 2012-08-08T19:24:18Z 2009-06 Article http://purl.org/eprint/type/ConferencePaper 978-1-4244-4193-8 978-1-4244-4190-7 INSPEC Accession Number: 10917099 W2B.002 http://hdl.handle.net/1721.1/72044 Velasquez-Garcia, L.F., B. Gassend, and A.I. Akinwande. “CNT-based Gas Ionizers with Integrated MEMS Gate for Portable Mass Spectrometry Applications.” IEEE, 2009. 1646–1649. © 2009 IEEE. https://orcid.org/0000-0003-3001-9223 en_US http://dx.doi.org/10.1109/SENSOR.2009.5285776 Proceedings of the 15th International Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009 Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use. application/pdf Institute of Electrical and Electronics Engineers IEEE |
| spellingShingle | Velasquez-Garcia, Luis Fernando Gassend, Blaise Akinwande, Akintunde Ibitayo CNT-based gas ionizers with integrated MEMS gate for portable mass spectrometry applications |
| title | CNT-based gas ionizers with integrated MEMS gate for portable mass spectrometry applications |
| title_full | CNT-based gas ionizers with integrated MEMS gate for portable mass spectrometry applications |
| title_fullStr | CNT-based gas ionizers with integrated MEMS gate for portable mass spectrometry applications |
| title_full_unstemmed | CNT-based gas ionizers with integrated MEMS gate for portable mass spectrometry applications |
| title_short | CNT-based gas ionizers with integrated MEMS gate for portable mass spectrometry applications |
| title_sort | cnt based gas ionizers with integrated mems gate for portable mass spectrometry applications |
| url | http://hdl.handle.net/1721.1/72044 https://orcid.org/0000-0003-3001-9223 |
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