Fabrication and Performance of Silicon-Embedded Permanent-Magnet Microgenerators
This paper focuses on the design, fabrication, and characterization of silicon-packaged permanent-magnet (PM) microgenerators. The use of silicon packaging favors fine control on shape and dimensions in batch fabrication and provides a path toward high rotational speeds (1Mr/min), a requirement for...
| Main Authors: | , , , , , |
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| 其他作者: | |
| 格式: | 文件 |
| 语言: | en_US |
| 出版: |
Institute of Electrical and Electronics Engineers (IEEE)
2012
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| 在线阅读: | http://hdl.handle.net/1721.1/72960 https://orcid.org/0000-0002-5765-4369 https://orcid.org/0000-0003-2167-9860 |